最小流量:0.1SCCM 最大流量:500SLPM
MC200-WR寬量程氣體層流質量流量控製器在MC200標準型氣體層流質量流量控製器的基礎上提高2倍的可精確測量範圍,實現在10%~100%的量程範圍內達到1%設定值精度,並通過產品內置的壓力、溫度傳感器的精確補償及獨創核心算法,在低零點、溫度、壓力漂移量上表現出了傑出性能。同時,內置多種氣體和混氣設置,有效簡化了係統的複雜度,減少客戶采購成本,提高係統的穩定度。
PIG-MC101-WR-00-0500 | 0.5 SCCM
PIG-MC101-WR-01-0001 | 1 SCCM
PIG-MC101-WR-01-0002 | 2 SCCM
PIG-MC101-WR-01-0005 | 5 SCCM
PIG-MC101-WR-01-0010 | 10 SCCM
PIG-MC101-WR-01-0020 | 20 SCCM
PIG-MC102-WR-01-0050 | 50 SCCM
PIG-MC102-WR-01-0100 | 100 SCCM
PIG-MC102-WR-01-0200 | 200 SCCM
PIG-MC102-WR-01-0500 | 500 SCCM
PIG-MC102-WR-01-1000 | 1000 SCCM
PIG-MC102-WR-01-2000 | 2000 SCCM
PIG-MC120-WR-02-0005 | 5 SLPM
PIG-MC120-WR-02-0010 | 10 SLPM
PIG-MC120-WR-02-0020 | 20 SLPM
PIG-MC120-WR-02-0050 | 50 SLPM
PIG-MC120-WR-02-0100 | 100 SLPM
PIG-MC120-WR-02-0200 | 200 SLPM
PIG-MC150-WR-02-0500 | 500 SLPM
PIG-MC101-WR-00-0500 | 0.5 SCCM
PIG-MC101-WR-01-0001 | 1 SCCM
PIG-MC101-WR-01-0002 | 2 SCCM
PIG-MC101-WR-01-0005 | 5 SCCM
PIG-MC101-WR-01-0010 | 10 SCCM
PIG-MC101-WR-01-0020 | 20 SCCM